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§¯§Ñ§ß§à§ä§Ö§ç§ß§à§Ý§à§Ô§Ú§Ú: §¯§Ñ§ß§à§Þ§Ñ§ä§Ö§â§Ú§Ñ§Ý§í, §ä§Ñ§Ü§Ú§Ö §Ü§Ñ§Ü §Ô§â§Ñ§æ§Ö§ß, §à§Ò§Ý§Ñ§Õ§Ñ§ð§ä §Ó§í§ã§à§Ü§à§Û §é§å§Ó§ã§ä§Ó§Ú§ä§Ö§Ý§î§ß§à§ã§ä§î§ð §Ú §Ò§í§ã§ä§â§í§Þ §Ó§â§Ö§Þ§Ö§ß§Ö§Þ §à§ä§Ü§Ý§Ú§Ü§Ñ, §é§ä§à §Õ§Ö§Ý§Ñ§Ö§ä §Ú§ç §Ú§Õ§Ö§Ñ§Ý§î§ß§í§Þ§Ú §Õ§Ý§ñ §á§â§Ú§Ý§à§Ø§Ö§ß§Ú§Û §Þ§à§ß§Ú§ä§à§â§Ú§ß§Ô§Ñ §Ó §â§Ö§Ñ§Ý§î§ß§à§Þ §Ó§â§Ö§Þ§Ö§ß§Ú. §¯§Ñ§á§â§Ú§Þ§Ö§â, §Õ§Ñ§ä§é§Ú§Ü§Ú §ß§Ñ §à§ã§ß§à§Ó§Ö §Ô§â§Ñ§æ§Ö§ß§Ñ §Þ§à§Ô§å§ä §à§Ò§ß§Ñ§â§å§Ø§Ú§Ó§Ñ§ä§î §Ú§Ù§Þ§Ö§ß§Ö§ß§Ú§ñ §ä§Ö§Þ§á§Ö§â§Ñ§ä§å§â§í §ã §ä§à§é§ß§à§ã§ä§î§ð §Õ§à ¡À0,1¡ãC §á§â§Ú §Þ§à§ß§Ú§ä§à§â§Ú§ß§Ô§Ö §à§Ü§â§å§Ø§Ñ§ð§ë§Ö§Û §ã§â§Ö§Õ§í, §Ù§ß§Ñ§é§Ú§ä§Ö§Ý§î§ß§à §á§à§Ó§í§ê§Ñ§ñ §ä§à§é§ß§à§ã§ä§î. §¿§ä§Ú §Õ§Ñ§ä§é§Ú§Ü§Ú §â§Ñ§Ù§â§Ñ§Ò§Ñ§ä§í§Ó§Ñ§ð§ä§ã§ñ §Õ§Ý§ñ §Ú§ã§á§à§Ý§î§Ù§à§Ó§Ñ§ß§Ú§ñ §Ó §â§Ñ§Ù§Ý§Ú§é§ß§í§ç §à§Ò§Ý§Ñ§ã§ä§ñ§ç, §à§ä §ß§à§ã§Ú§Þ§í§ç §å§ã§ä§â§à§Û§ã§ä§Ó §Õ§à §ã§Ú§ã§ä§Ö§Þ §Þ§à§ß§Ú§ä§à§â§Ú§ß§Ô§Ñ §à§Ü§â§å§Ø§Ñ§ð§ë§Ö§Û §ã§â§Ö§Õ§í, §Ú §á§à§ä§Ö§ß§è§Ú§Ñ§Ý§î§ß§à §Þ§à§Ô§å§ä §á§â§à§Ú§Ù§Ó§Ö§ã§ä§Ú §â§Ö§Ó§à§Ý§ð§è§Ú§ð §Ó §ã§á§à§ã§à§Ò§Ñ§ç §Ú§Ù§Þ§Ö§â§Ö§ß§Ú§ñ §ä§Ö§Þ§á§Ö§â§Ñ§ä§å§â§í. MEMS-§Õ§Ñ§ä§é§Ú§Ü§Ú: §®§Ú§Ü§â§à§ï§Ý§Ö§Ü§ä§â§à§Þ§Ö§ç§Ñ§ß§Ú§é§Ö§ã§Ü§Ú§Ö §ã§Ú§ã§ä§Ö§Þ§í (MEMS) §Õ§Ñ§ä§é§Ú§Ü§Ú §Þ§Ö§ß§î§ê§Ö §á§à §â§Ñ§Ù§Þ§Ö§â§å §Ú §á§à§ä§â§Ö§Ò§Ý§ñ§ð§ä §Þ§Ö§ß§î§ê§Ö §ï§ß§Ö§â§Ô§Ú§Ú, §é§ä§à §Õ§Ö§Ý§Ñ§Ö§ä §Ú§ç §Ú§Õ§Ö§Ñ§Ý§î§ß§í§Þ§Ú §Õ§Ý§ñ §Ú§ã§á§à§Ý§î§Ù§à§Ó§Ñ§ß§Ú§ñ §Ó §Ñ§Ó§ä§à§Þ§à§Ò§Ú§Ý§î§ß§à§Û §á§â§à§Þ§í§ê§Ý§Ö§ß§ß§à§ã§ä§Ú §Ú §ß§à§ã§Ú§Þ§í§ç §å§ã§ä§â§à§Û§ã§ä§Ó§Ñ§ç. §¯§Ñ§á§â§Ú§Þ§Ö§â, MEMS-§Õ§Ñ§ä§é§Ú§Ü§Ú §Ó §ß§à§ã§Ú§Þ§í§ç §å§ã§ä§â§à§Û§ã§ä§Ó§Ñ§ç §à§Ò§Ö§ã§á§Ö§é§Ú§Ó§Ñ§ð§ä §ä§à§é§ß§í§Ö §Õ§Ñ§ß§ß§í§Ö §à §ä§Ö§Þ§á§Ö§â§Ñ§ä§å§â§Ö §ã §Ó§â§Ö§Þ§Ö§ß§Ö§Þ §Ñ§Ó§ä§à§ß§à§Þ§ß§à§Û §â§Ñ§Ò§à§ä§í §Õ§à 10 §Õ§ß§Ö§Û, §é§ä§à §Õ§Ö§Ý§Ñ§Ö§ä §Ú§ç §á§à§Õ§ç§à§Õ§ñ§ë§Ú§Þ§Ú §Õ§Ý§ñ §Õ§à§Ý§Ô§à§ã§â§à§é§ß§à§Ô§à §Þ§à§ß§Ú§ä§à§â§Ú§ß§Ô§Ñ. §¿§ä§Ú §Õ§Ñ§ä§é§Ú§Ü§Ú §ä§Ñ§Ü§Ø§Ö §à§Ò§Ö§ã§á§Ö§é§Ú§Ó§Ñ§ð§ä §á§Ö§â§Ö§Õ§Ñ§é§å §Õ§Ñ§ß§ß§í§ç §Ó §â§Ö§Ñ§Ý§î§ß§à§Þ §Ó§â§Ö§Þ§Ö§ß§Ú, §â§Ñ§ã§ê§Ú§â§ñ§ñ §æ§å§ß§Ü§è§Ú§à§ß§Ñ§Ý§î§ß§à§ã§ä§î §Ú§ß§ä§Ö§Ý§Ý§Ö§Ü§ä§å§Ñ§Ý§î§ß§í§ç §å§ã§ä§â§à§Û§ã§ä§Ó §Ú §á§â§Ö§Õ§à§ã§ä§Ñ§Ó§Ý§ñ§ñ §á§à§Ý§î§Ù§à§Ó§Ñ§ä§Ö§Ý§ñ§Þ §è§Ö§ß§ß§å§ð §Ú§ß§æ§à§â§Þ§Ñ§è§Ú§ð. §¬§Ó§Ñ§ß§ä§à§Ó§í§Ö §Õ§Ñ§ä§é§Ú§Ü§Ú: §¬§Ó§Ñ§ß§ä§à§Ó§í§Ö §Õ§Ñ§ä§é§Ú§Ü§Ú §à§Ò§Ö§ã§á§Ö§é§Ú§Ó§Ñ§ð§ä §Ò§Ö§ã§á§â§Ö§è§Ö§Õ§Ö§ß§ä§ß§å§ð §ä§à§é§ß§à§ã§ä§î, §ß§à §Ó§ã§Ö §Ö§ë§Ö §ß§Ñ§ç§à§Õ§ñ§ä§ã§ñ §ß§Ñ §ï§Ü§ã§á§Ö§â§Ú§Þ§Ö§ß§ä§Ñ§Ý§î§ß§à§Û §ã§ä§Ñ§Õ§Ú§Ú. §¯§Ñ§á§â§Ú§Þ§Ö§â, §Ü§Ó§Ñ§ß§ä§à§Ó§í§Ö §Õ§Ñ§ä§é§Ú§Ü§Ú §Ó §á§â§Ö§è§Ú§Ù§Ú§à§ß§ß§à§Û §ä§Ö§ç§ß§Ú§Ü§Ö §Þ§à§Ô§å§ä §Ú§Ù§Þ§Ö§â§ñ§ä§î §ä§Ö§Þ§á§Ö§â§Ñ§ä§å§â§å §ã §ä§à§é§ß§à§ã§ä§î§ð ¡À0,01¡ãC, §é§ä§à §Ù§ß§Ñ§é§Ú§ä§Ö§Ý§î§ß§à §á§â§Ö§Ó§à§ã§ç§à§Õ§Ú§ä §ä§â§Ñ§Õ§Ú§è§Ú§à§ß§ß§í§Ö §Õ§Ñ§ä§é§Ú§Ü§Ú. §·§à§ä§ñ §à§ß§Ú §Õ§à§â§à§Ô§Ú §Ú §á§à§Ü§Ñ §ß§Ö §ñ§Ó§Ý§ñ§ð§ä§ã§ñ §Ü§à§Þ§Þ§Ö§â§é§Ö§ã§Ü§Ú §Ø§Ú§Ù§ß§Ö§ã§á§à§ã§à§Ò§ß§í§Þ§Ú, §à§ß§Ú §à§Ò§Ý§Ñ§Õ§Ñ§ð§ä §à§Ô§â§à§Þ§ß§í§Þ §á§à§ä§Ö§ß§è§Ú§Ñ§Ý§à§Þ §Õ§Ý§ñ §Ò§å§Õ§å§ë§Ú§ç §á§â§Ú§Þ§Ö§ß§Ö§ß§Ú§Û, §ä§â§Ö§Ò§å§ð§ë§Ú§ç §á§â§Ö§Õ§Ö§Ý§î§ß§à§Û §ä§à§é§ß§à§ã§ä§Ú. §ª§ã§ã§Ý§Ö§Õ§à§Ó§Ñ§ß§Ú§ñ §Ó §ï§ä§à§Û §à§Ò§Ý§Ñ§ã§ä§Ú §á§â§à§Õ§à§Ý§Ø§Ñ§ð§ä§ã§ñ, §Ú §Þ§ß§à§Ô§Ú§Ö §å§é§Ö§ß§í§Ö §â§Ñ§Ò§à§ä§Ñ§ð§ä §ß§Ñ§Õ §â§Ñ§Ù§â§Ñ§Ò§à§ä§Ü§à§Û §Ò§à§Ý§Ö§Ö §Õ§à§ã§ä§å§á§ß§í§ç §Ú §á§â§Ñ§Ü§ä§Ú§é§ß§í§ç §Ü§Ó§Ñ§ß§ä§à§Ó§í§ç §Õ§Ñ§ä§é§Ú§Ü§à§Ó §Õ§Ý§ñ §á§à§Ó§ã§Ö§Õ§ß§Ö§Ó§ß§à§Ô§à §Ú§ã§á§à§Ý§î§Ù§à§Ó§Ñ§ß§Ú§ñ.
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