§¬§à§Þ§á§Ñ§ß§Ú§ñ ICP Sensor ¡ª §á§â§à§Ú§Ù§Ó§à§Õ§Ú§ä§Ö§Ý§î §Þ§Ö§ä§Ö§à§â§à§Ý§à§Ô§Ú§é§Ö§ã§Ü§Ú§ç §Õ§Ñ§ä§é§Ú§Ü§à§Ó §Ú §á§à§ã§ä§Ñ§Ó§ë§Ú§Ü §â§Ö§ê§Ö§ß§Ú§Û §Õ§Ý§ñ §Þ§à§ß§Ú§ä§à§â§Ú§ß§Ô§Ñ §à§Ü§â§å§Ø§Ñ§ð§ë§Ö§Û §ã§â§Ö§Õ§í §ã §Ò§à§Ý§Ö§Ö §é§Ö§Þ 15-§Ý§Ö§ä§ß§Ú§Þ §à§á§í§ä§à§Þ §â§Ñ§Ò§à§ä§í §Ó §à§ä§â§Ñ§ã§Ý§Ú.
§¬§Ñ§Ü§Ú§Ö §Ü§Ý§ð§é§Ö§Ó§í§Ö §æ§Ñ§Ü§ä§à§â§í §Ó§Ý§Ú§ñ§ð§ä §ß§Ñ §â§Ñ§Ò§à§ä§à§ã§á§à§ã§à§Ò§ß§à§ã§ä§î §Õ§Ñ§ä§é§Ú§Ü§Ñ §å§â§à§Ó§ß§ñ §Ó§à§Õ§í §Ó §â§Ö§Ù§Ö§â§Ó§å§Ñ§â§Ö?
§¥§Ñ§ä§é§Ú§Ü§Ú §å§â§à§Ó§ß§ñ §Ó§à§Õ§í §Ó §â§Ö§Ù§Ö§â§Ó§å§Ñ§â§Ñ§ç §Ú§Ô§â§Ñ§ð§ä §â§Ö§ê§Ñ§ð§ë§å§ð §â§à§Ý§î §Ó §â§Ñ§Ù§Ý§Ú§é§ß§í§ç §à§ä§â§Ñ§ã§Ý§ñ§ç §á§â§à§Þ§í§ê§Ý§Ö§ß§ß§à§ã§ä§Ú §Ú §à§Ò§Ý§Ñ§ã§ä§ñ§ç §á§â§Ú§Þ§Ö§ß§Ö§ß§Ú§ñ, §á§â§Ö§Õ§à§ã§ä§Ñ§Ó§Ý§ñ§ñ §Õ§Ñ§ß§ß§í§Ö §à§Ò §å§â§à§Ó§ß§Ö §Ó§à§Õ§í §Ó §â§Ö§Ù§Ö§â§Ó§å§Ñ§â§Ñ§ç §Ó §â§Ö§Ø§Ú§Þ§Ö §â§Ö§Ñ§Ý§î§ß§à§Ô§à §Ó§â§Ö§Þ§Ö§ß§Ú. §°§Õ§ß§Ñ§Ü§à §ß§Ñ §â§Ñ§Ò§à§ä§å §ï§ä§Ú§ç §Õ§Ñ§ä§é§Ú§Ü§à§Ó §Þ§à§Ô§å§ä §Ó§Ý§Ú§ñ§ä§î §ß§Ö§ã§Ü§à§Ý§î§Ü§à §Ü§Ý§ð§é§Ö§Ó§í§ç §æ§Ñ§Ü§ä§à§â§à§Ó, §Ü§à§ä§à§â§í§Ö §ß§Ö§à§Ò§ç§à§Õ§Ú§Þ§à §á§à§ß§Ú§Þ§Ñ§ä§î §Ú §å§é§Ú§ä§í§Ó§Ñ§ä§î §Õ§Ý§ñ §à§Ò§Ö§ã§á§Ö§é§Ö§ß§Ú§ñ §ä§à§é§ß§í§ç §Ú §ß§Ñ§Õ§Ö§Ø§ß§í§ç §Ú§Ù§Þ§Ö§â§Ö§ß§Ú§Û. §£ §ï§ä§à§Û §ã§ä§Ñ§ä§î§Ö §Þ§í §â§Ñ§ã§ã§Þ§à§ä§â§Ú§Þ §Ü§Ý§ð§é§Ö§Ó§í§Ö §æ§Ñ§Ü§ä§à§â§í, §Ü§à§ä§à§â§í§Ö §Þ§à§Ô§å§ä §Ó§Ý§Ú§ñ§ä§î §ß§Ñ §â§Ñ§Ò§à§ä§å §Õ§Ñ§ä§é§Ú§Ü§Ñ §å§â§à§Ó§ß§ñ §Ó§à§Õ§í §Ó §â§Ö§Ù§Ö§â§Ó§å§Ñ§â§Ö, §Ú §â§Ñ§Ù§Ò§Ö§â§Ö§Þ§ã§ñ, §Ü§Ñ§Ü §Ú§ç §Þ§à§Ø§ß§à §à§á§ä§Ú§Þ§Ú§Ù§Ú§â§à§Ó§Ñ§ä§î §Õ§Ý§ñ §Õ§à§ã§ä§Ú§Ø§Ö§ß§Ú§ñ §Ý§å§é§ê§Ú§ç §â§Ö§Ù§å§Ý§î§ä§Ñ§ä§à§Ó.
1. §´§Ú§á §Õ§Ñ§ä§é§Ú§Ü§Ñ
§´§Ú§á §Õ§Ñ§ä§é§Ú§Ü§Ñ, §Ú§ã§á§à§Ý§î§Ù§å§Ö§Þ§à§Ô§à §Ó §â§Ö§Ù§Ö§â§Ó§å§Ñ§â§Ö §Õ§Ý§ñ §Ó§à§Õ§í, §Þ§à§Ø§Ö§ä §ã§å§ë§Ö§ã§ä§Ó§Ö§ß§ß§à §Ó§Ý§Ú§ñ§ä§î §ß§Ñ §Ö§Ô§à §â§Ñ§Ò§à§ä§å. §³§å§ë§Ö§ã§ä§Ó§å§ð§ä §â§Ñ§Ù§Ý§Ú§é§ß§í§Ö §ä§Ú§á§í §Õ§Ñ§ä§é§Ú§Ü§à§Ó, §Ó§Ü§Ý§ð§é§Ñ§ñ §á§à§á§Ý§Ñ§Ó§Ü§à§Ó§í§Ö §Õ§Ñ§ä§é§Ú§Ü§Ú, §Õ§Ñ§ä§é§Ú§Ü§Ú §Õ§Ñ§Ó§Ý§Ö§ß§Ú§ñ, §å§Ý§î§ä§â§Ñ§Ù§Ó§å§Ü§à§Ó§í§Ö §Õ§Ñ§ä§é§Ú§Ü§Ú §Ú §Ö§Þ§Ü§à§ã§ä§ß§í§Ö §Õ§Ñ§ä§é§Ú§Ü§Ú. §¬§Ñ§Ø§Õ§í§Û §ä§Ú§á §Õ§Ñ§ä§é§Ú§Ü§Ñ §Ú§Þ§Ö§Ö§ä §ã§Ó§à§Ú §á§â§Ö§Ú§Þ§å§ë§Ö§ã§ä§Ó§Ñ §Ú §ß§Ö§Õ§à§ã§ä§Ñ§ä§Ü§Ú, §Ú §Ó§í§Ò§à§â §Õ§Ñ§ä§é§Ú§Ü§Ñ §Ò§å§Õ§Ö§ä §Ù§Ñ§Ó§Ú§ã§Ö§ä§î §à§ä §Ü§à§ß§Ü§â§Ö§ä§ß§í§ç §ä§â§Ö§Ò§à§Ó§Ñ§ß§Ú§Û §á§â§Ú§Þ§Ö§ß§Ö§ß§Ú§ñ.
§±§à§á§Ý§Ñ§Ó§Ü§à§Ó§í§Ö §Õ§Ñ§ä§é§Ú§Ü§Ú §á§â§à§ã§ä§í §Ú §ï§Ü§à§ß§à§Þ§Ú§é§ß§í, §ß§à §ã§à §Ó§â§Ö§Þ§Ö§ß§Ö§Þ §Þ§à§Ô§å§ä §á§à§Õ§Ó§Ö§â§Ô§Ñ§ä§î§ã§ñ §Þ§Ö§ç§Ñ§ß§Ú§é§Ö§ã§Ü§à§Þ§å §Ú§Ù§ß§à§ã§å. §¥§Ñ§ä§é§Ú§Ü§Ú §Õ§Ñ§Ó§Ý§Ö§ß§Ú§ñ §à§Ò§Ý§Ñ§Õ§Ñ§ð§ä §Ó§í§ã§à§Ü§à§Û §ä§à§é§ß§à§ã§ä§î§ð, §ß§à §ß§Ñ §ß§Ú§ç §Þ§à§Ô§å§ä §Ó§Ý§Ú§ñ§ä§î §Ú§Ù§Þ§Ö§ß§Ö§ß§Ú§ñ §ä§Ö§Þ§á§Ö§â§Ñ§ä§å§â§í §Ú §Õ§Ñ§Ó§Ý§Ö§ß§Ú§ñ. §µ§Ý§î§ä§â§Ñ§Ù§Ó§å§Ü§à§Ó§í§Ö §Õ§Ñ§ä§é§Ú§Ü§Ú §Ò§Ö§ã§Ü§à§ß§ä§Ñ§Ü§ä§ß§í §Ú §Ú§Õ§Ö§Ñ§Ý§î§ß§à §á§à§Õ§ç§à§Õ§ñ§ä §Õ§Ý§ñ §Ò§à§Ý§î§ê§Ú§ç §â§Ö§Ù§Ö§â§Ó§å§Ñ§â§à§Ó, §ß§à §Þ§à§Ô§å§ä §Ú§ã§á§í§ä§í§Ó§Ñ§ä§î §ä§â§å§Õ§ß§à§ã§ä§Ú §ã §á§Ö§ß§à§Û §Ú§Ý§Ú §á§Ñ§â§à§Þ. §¦§Þ§Ü§à§ã§ä§ß§í§Ö §Õ§Ñ§ä§é§Ú§Ü§Ú §ß§Ñ§Õ§Ö§Ø§ß§í §Ú §ä§à§é§ß§í, §ß§à §Þ§à§Ô§å§ä §á§à§ä§â§Ö§Ò§à§Ó§Ñ§ä§î §Ü§Ñ§Ý§Ú§Ò§â§à§Ó§Ü§Ú.
2. §®§Ñ§ä§Ö§â§Ú§Ñ§Ý §Ú §â§Ñ§Ù§Þ§Ö§â§í §â§Ö§Ù§Ö§â§Ó§å§Ñ§â§Ñ
§®§Ñ§ä§Ö§â§Ú§Ñ§Ý §Ú §â§Ñ§Ù§Þ§Ö§â §â§Ö§Ù§Ö§â§Ó§å§Ñ§â§Ñ §ä§Ñ§Ü§Ø§Ö §Þ§à§Ô§å§ä §Ó§Ý§Ú§ñ§ä§î §ß§Ñ §â§Ñ§Ò§à§ä§å §Õ§Ñ§ä§é§Ú§Ü§Ñ §å§â§à§Ó§ß§ñ §Ó§à§Õ§í. §²§Ñ§Ù§Ý§Ú§é§ß§í§Ö §Þ§Ñ§ä§Ö§â§Ú§Ñ§Ý§í, §ä§Ñ§Ü§Ú§Ö §Ü§Ñ§Ü §á§Ý§Ñ§ã§ä§Ú§Ü, §Þ§Ö§ä§Ñ§Ý§Ý §Ú§Ý§Ú §Ò§Ö§ä§à§ß, §Þ§à§Ô§å§ä §Ó§Ý§Ú§ñ§ä§î §ß§Ñ §ã§á§à§ã§à§Ò§ß§à§ã§ä§î §Õ§Ñ§ä§é§Ú§Ü§Ñ §á§â§à§ß§Ú§Ü§Ñ§ä§î §ã§Ü§Ó§à§Ù§î §ß§Ú§ç §Ú §ä§à§é§ß§à §Ú§Ù§Þ§Ö§â§ñ§ä§î §å§â§à§Ó§Ö§ß§î §Ó§à§Õ§í. §¬§â§à§Þ§Ö §ä§à§Ô§à, §â§Ñ§Ù§Þ§Ö§â §â§Ö§Ù§Ö§â§Ó§å§Ñ§â§Ñ §Þ§à§Ø§Ö§ä §Ó§Ý§Ú§ñ§ä§î §ß§Ñ §Õ§Ñ§Ý§î§ß§à§ã§ä§î §Õ§Ö§Û§ã§ä§Ó§Ú§ñ §Ú §â§Ñ§Ù§â§Ö§ê§Ö§ß§Ú§Ö §Õ§Ñ§ä§é§Ú§Ü§Ñ.
§¯§Ñ§á§â§Ú§Þ§Ö§â, §Õ§Ñ§ä§é§Ú§Ü, §â§Ñ§Ù§â§Ñ§Ò§à§ä§Ñ§ß§ß§í§Û §Õ§Ý§ñ §ß§Ö§Ò§à§Ý§î§ê§à§Ô§à §á§Ý§Ñ§ã§ä§Ú§Ü§à§Ó§à§Ô§à §â§Ö§Ù§Ö§â§Ó§å§Ñ§â§Ñ, §Þ§à§Ø§Ö§ä §ß§Ö §á§à§Õ§à§Û§ä§Ú §Õ§Ý§ñ §Ò§à§Ý§î§ê§à§Ô§à §Þ§Ö§ä§Ñ§Ý§Ý§Ú§é§Ö§ã§Ü§à§Ô§à §â§Ö§Ù§Ö§â§Ó§å§Ñ§â§Ñ §Ú§Ù-§Ù§Ñ §â§Ñ§Ù§Ý§Ú§é§Ú§Û §Ó §á§â§à§Ó§à§Õ§Ú§Þ§à§ã§ä§Ú §Ú §á§à§Þ§Ö§ç. §¥§Ý§ñ §à§Ò§Ö§ã§á§Ö§é§Ö§ß§Ú§ñ §ß§Ñ§Õ§Ö§Ø§ß§í§ç §Ú§Ù§Þ§Ö§â§Ö§ß§Ú§Û §Ü§â§Ñ§Û§ß§Ö §Ó§Ñ§Ø§ß§à §Ó§í§Ò§â§Ñ§ä§î §Õ§Ñ§ä§é§Ú§Ü, §ã§à§Ó§Þ§Ö§ã§ä§Ú§Þ§í§Û §ã §Þ§Ñ§ä§Ö§â§Ú§Ñ§Ý§à§Þ §Ú §â§Ñ§Ù§Þ§Ö§â§à§Þ §â§Ö§Ù§Ö§â§Ó§å§Ñ§â§Ñ.
3. §µ§ã§Ý§à§Ó§Ú§ñ §à§Ü§â§å§Ø§Ñ§ð§ë§Ö§Û §ã§â§Ö§Õ§í
§µ§ã§Ý§à§Ó§Ú§ñ §à§Ü§â§å§Ø§Ñ§ð§ë§Ö§Û §ã§â§Ö§Õ§í, §ä§Ñ§Ü§Ú§Ö §Ü§Ñ§Ü §ä§Ö§Þ§á§Ö§â§Ñ§ä§å§â§Ñ, §Ó§Ý§Ñ§Ø§ß§à§ã§ä§î §Ú §Ü§Ñ§é§Ö§ã§ä§Ó§à §Ó§à§Ù§Õ§å§ç§Ñ, §Þ§à§Ô§å§ä §Ó§Ý§Ú§ñ§ä§î §ß§Ñ §â§Ñ§Ò§à§ä§å §Õ§Ñ§ä§é§Ú§Ü§Ñ §å§â§à§Ó§ß§ñ §Ó§à§Õ§í §Ó §â§Ö§Ù§Ö§â§Ó§å§Ñ§â§Ö. §¿§Ü§ã§ä§â§Ö§Þ§Ñ§Ý§î§ß§í§Ö §ä§Ö§Þ§á§Ö§â§Ñ§ä§å§â§í §Þ§à§Ô§å§ä §á§à§Ó§Ý§Ú§ñ§ä§î §ß§Ñ §ä§à§é§ß§à§ã§ä§î §Ú §Ó§â§Ö§Þ§ñ §à§ä§Ü§Ý§Ú§Ü§Ñ §Õ§Ñ§ä§é§Ú§Ü§Ñ, §Ñ §Ó§í§ã§à§Ü§Ú§Û §å§â§à§Ó§Ö§ß§î §Ó§Ý§Ñ§Ø§ß§à§ã§ä§Ú §Þ§à§Ø§Ö§ä §Ó§í§Ù§Ó§Ñ§ä§î §Ü§à§ß§Õ§Ö§ß§ã§Ñ§è§Ú§ð §Ú §á§à§Ó§Ý§Ú§ñ§ä§î §ß§Ñ §á§Ö§â§Ö§Õ§Ñ§é§å §ã§Ú§Ô§ß§Ñ§Ý§Ñ.
§¬§â§à§Þ§Ö §ä§à§Ô§à, §á§Ý§à§ç§à§Ö §Ü§Ñ§é§Ö§ã§ä§Ó§à §Ó§à§Ù§Õ§å§ç§Ñ, §ß§Ñ§á§â§Ú§Þ§Ö§â, §ß§Ñ§Ý§Ú§é§Ú§Ö §á§í§Ý§Ú, §Ú§ã§á§Ñ§â§Ö§ß§Ú§Û §Ú§Ý§Ú §Ô§Ñ§Ù§à§Ó, §Þ§à§Ø§Ö§ä §á§â§Ú§Ó§Ö§ã§ä§Ú §Ü §Ù§Ñ§Ô§â§ñ§Ù§ß§Ö§ß§Ú§ð §Õ§Ñ§ä§é§Ú§Ü§Ñ §Ú §Ö§Ô§à §ß§Ö§Ú§ã§á§â§Ñ§Ó§ß§à§ã§ä§Ú. §¬§â§Ñ§Û§ß§Ö §Ó§Ñ§Ø§ß§à §å§é§Ú§ä§í§Ó§Ñ§ä§î §å§ã§Ý§à§Ó§Ú§ñ §à§Ü§â§å§Ø§Ñ§ð§ë§Ö§Û §ã§â§Ö§Õ§í, §Ó §Ü§à§ä§à§â§í§ç §Ò§å§Õ§Ö§ä §â§Ñ§Ò§à§ä§Ñ§ä§î §Õ§Ñ§ä§é§Ú§Ü, §Ú §Ó§í§Ò§Ú§â§Ñ§ä§î §Õ§Ñ§ä§é§Ú§Ü, §â§Ñ§ã§ã§é§Ú§ä§Ñ§ß§ß§í§Û §ß§Ñ §â§Ñ§Ò§à§ä§å §Ó §ï§ä§Ú§ç §å§ã§Ý§à§Ó§Ú§ñ§ç, §Õ§Ý§ñ §Õ§à§ã§ä§Ú§Ø§Ö§ß§Ú§ñ §à§á§ä§Ú§Þ§Ñ§Ý§î§ß§à§Û §á§â§à§Ú§Ù§Ó§à§Õ§Ú§ä§Ö§Ý§î§ß§à§ã§ä§Ú.
4. §µ§ã§ä§Ñ§ß§à§Ó§Ü§Ñ §Ú §Ü§Ñ§Ý§Ú§Ò§â§à§Ó§Ü§Ñ
§µ§ã§ä§Ñ§ß§à§Ó§Ü§Ñ §Ú §Ü§Ñ§Ý§Ú§Ò§â§à§Ó§Ü§Ñ §Õ§Ñ§ä§é§Ú§Ü§Ñ §å§â§à§Ó§ß§ñ §Ó§à§Õ§í §Ó §â§Ö§Ù§Ö§â§Ó§å§Ñ§â§Ö §ñ§Ó§Ý§ñ§ð§ä§ã§ñ §Ü§â§Ú§ä§Ú§é§Ö§ã§Ü§Ú §Ó§Ñ§Ø§ß§í§Þ§Ú §æ§Ñ§Ü§ä§à§â§Ñ§Þ§Ú, §Ó§Ý§Ú§ñ§ð§ë§Ú§Þ§Ú §ß§Ñ §Ö§Ô§à §â§Ñ§Ò§à§ä§å. §¯§Ö§á§â§Ñ§Ó§Ú§Ý§î§ß§Ñ§ñ §å§ã§ä§Ñ§ß§à§Ó§Ü§Ñ, §ß§Ñ§á§â§Ú§Þ§Ö§â, §ß§Ö§á§â§Ñ§Ó§Ú§Ý§î§ß§à§Ö §â§Ñ§Ù§Þ§Ö§ë§Ö§ß§Ú§Ö §Ú§Ý§Ú §à§â§Ú§Ö§ß§ä§Ñ§è§Ú§ñ, §Þ§à§Ø§Ö§ä §á§â§Ú§Ó§Ö§ã§ä§Ú §Ü §ß§Ö§ä§à§é§ß§í§Þ §á§à§Ü§Ñ§Ù§Ñ§ß§Ú§ñ§Þ §Ú §à§ê§Ú§Ò§Ü§Ñ§Þ §Ú§Ù§Þ§Ö§â§Ö§ß§Ú§ñ. §¬§Ñ§Ý§Ú§Ò§â§à§Ó§Ü§Ñ §ß§Ö§à§Ò§ç§à§Õ§Ú§Þ§Ñ §Õ§Ý§ñ §à§Ò§Ö§ã§á§Ö§é§Ö§ß§Ú§ñ §á§â§Ñ§Ó§Ú§Ý§î§ß§à§Û §ß§Ñ§ã§ä§â§à§Û§Ü§Ú §Õ§Ñ§ä§é§Ú§Ü§Ñ §Ú §á§à§Ý§å§é§Ö§ß§Ú§ñ §ä§à§é§ß§í§ç §Ú §ß§Ñ§Õ§Ö§Ø§ß§í§ç §Õ§Ñ§ß§ß§í§ç.
§¥§Ý§ñ §à§á§ä§Ú§Þ§Ú§Ù§Ñ§è§Ú§Ú §â§Ñ§Ò§à§ä§í §Õ§Ñ§ä§é§Ú§Ü§Ñ §Ü§â§Ñ§Û§ß§Ö §Ó§Ñ§Ø§ß§à §ã§Ý§Ö§Õ§à§Ó§Ñ§ä§î §â§Ö§Ü§à§Þ§Ö§ß§Õ§Ñ§è§Ú§ñ§Þ §á§â§à§Ú§Ù§Ó§à§Õ§Ú§ä§Ö§Ý§ñ §á§à §å§ã§ä§Ñ§ß§à§Ó§Ü§Ö §Ú §Ü§Ñ§Ý§Ú§Ò§â§à§Ó§Ü§Ö. §´§Ñ§Ü§Ø§Ö §â§Ö§Ü§à§Þ§Ö§ß§Õ§å§Ö§ä§ã§ñ §á§â§à§Ó§à§Õ§Ú§ä§î §â§Ö§Ô§å§Ý§ñ§â§ß§à§Ö §ä§Ö§ç§ß§Ú§é§Ö§ã§Ü§à§Ö §à§Ò§ã§Ý§å§Ø§Ú§Ó§Ñ§ß§Ú§Ö §Ú §Ü§Ñ§Ý§Ú§Ò§â§à§Ó§Ü§å, §é§ä§à§Ò§í §Ô§Ñ§â§Ñ§ß§ä§Ú§â§à§Ó§Ñ§ä§î §ï§æ§æ§Ö§Ü§ä§Ú§Ó§ß§å§ð §â§Ñ§Ò§à§ä§å §Õ§Ñ§ä§é§Ú§Ü§Ñ §Ó §ä§Ö§é§Ö§ß§Ú§Ö §Õ§Ý§Ú§ä§Ö§Ý§î§ß§à§Ô§à §Ó§â§Ö§Þ§Ö§ß§Ú.
5. §±§à§Þ§Ö§ç§Ú §Ú §á§â§Ö§á§ñ§ä§ã§ä§Ó§Ú§ñ
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